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| Throughput |
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When wafers spend over 50% of their process time waiting to be loaded into the next tool or stage, new throughput approaches are needed. Count on Rexroth products to meet the higher duty cycles and faster cycle processing times you need.
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Our technology includes:
- Pneumatic components which deliver repetitive precision for consistent production.
- Linear elements which support repetitive high speeds, accelerations and motion for practically maintenance-free operation.
- Motion control platforms which feature tight motion and I/O synchronization, for faster measurements coupled to motion or position.
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