Suitable solutions for highest precision: Bosch Rexroth offers the world’s largest automation technology portfolio for the semiconductor industry
With several hundred process steps and movements in the nanometer range, semiconductor production requires utmost precision. The semiconductor industry is looking for automation partners providing innovative and customized system solutions. Bosch Rexroth's multi-technology portfolio is considered leading edge in the industry in terms of function and quality for all process steps in electronics manufacturing.
With its Linear Motion System, Bosch Rexroth sets a new standard for configurability: In this system, all electronic parts are mounted outside of the process chamber. This provides a non-contact method for moving the wafers through the enclosed process chamber. The system is easy to maintain, plus the control unit offers the user numerous additional motion operations.
Moreover, Bosch Rexroth customers have access to numerous modules for wafer handling, wafer stages, back-end, gantry and solutions for plastic electronics. From jerk-free, slow movements to high-speed position, our systems guarantee utmost precision across the entire range.
All over the world, our customers rely on our dense network of industry experts which allows us to offer knowledgeable on-site advice and fast service. In all we do, we always ensure our clients' know-how is always protected - as Bosch Rexroth's track record of more than one decade in the industry proves.