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xxx 2012-07-05

Precise, flexible, cost effective Rexroth automation solutions for the semiconductor industry

Precise, flexible, cost effective Rexroth automation solutions for the semiconductor industry

There is scarcely another industry in which the speed of innovation moves as quickly as in the semiconductor industry, where extreme demands are placed on automation. Rexroth bundles global application experience in the industry and uses it to develop custom automation solutions, such as for wafer production, front- and back-end processes, and for circuit board assembly.

The semiconductor industry has high standards when it comes to performance for automation solutions. Only components tailored to each specific requirement can safely and reliably perform motion tasks under vacuum, controlled atmospheric, and cleanroom conditions. From extremely slow to highly-dynamic motion: the range of automation tasks is expansive and requires the highest degree of precision and repetition accuracy down to the nanometer range. Machine manufacturers require solutions that offer the maximum possible degree of freedom through open structures. Multi-technological system solutions from Rexroth reduce complexity in engineering, assembly, and during commissioning. Variants specially developed for the semiconductor industry meet the industry’s requirements for standardized platforms.

Rexroth’s product portfolio includes a wide range of drives for rotational servo and stepping motors as well as a broad spectrum of direct drives. Ironless linear motors specially developed for the semiconductor industry come in five sizes with graded lengths and cover a wide range of powers and speeds.

Rexroth provides motion control systems with an open architecture and compact drives to meet users’ control needs. Their universal encoder interface allows them to work seamlessly with a variety of measuring systems. Rexroth delivers the motors as ready-to-install axes complete with aligned linear guides, length measuring systems, and drive controllers.

Rexroth features a comprehensive selection of profile rails and runner blocks. Precise manufacturing with compatible accuracy and preload levels makes it possible to provide extensive combinations and flexibility in all designs. That allows for the combination of any runner blocks and rails of the same size and based on the same technology. Corrosion-resistant and cleanroom-suitable models can be used for standardization across all process steps. Just as with all its technologies, Rexroth uses detailed scalability in linear technology and has developed an extensive range of miniature and high-precision guides for the semiconductor industry. Precision modules are responsible for the highly-dynamic motion of small masses in the smallest spaces as ready-to-install linear systems. The integrated ball screw drive with zero-clearance nut system guarantees exceptional positioning and repetitive accuracy.

Rexroth’s pneumatics portfolio is comprised of a wide range of actuators, valve terminal systems and compressed air treatment systems. These components can be integrated into a wide variety of automation environments via bus modules to all conventional control communication systems. A number of positioning, rotating and gripping modules allow for extensive flexibility when it comes to working with components. Only Rexroth offers dimension-identical pneumatic and electrical actuators with positive-locking Easy-2-Combine connection technology. That makes it easy to exchange the two technologies without having to interfere with the basic construction.

Rexroth will be an exhibitor at SEMICON West 2012, booth 2107.

Bosch Rexroth AG is one of the world’s leading specialists in the field of drive and control technologies. Under the Rexroth brand name, the company supplies more than 500,000 customers with tailored solutions for driving, controlling, and moving. Bosch Rexroth is a partner for Mobile Applications, Machinery Applications and Engineering, Factory Automation and Renewable Energies. The company provides customized solutions tailored to the needs and specifications of each individual market. As The Drive & Control Company, Bosch Rexroth develops, produces, and sells components and systems in over 80 countries. As part of the Bosch Group, Bosch Rexroth and its 38,400 associates generated approximately 6.4 billion euros in revenue in 2011.

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In the U.S., Canada and Mexico, the Bosch Group manufactures and markets automotive original equipment and aftermarket products, industrial drives and control technology, power tools, security and communication systems, packaging technology, thermotechnology, household appliances, solar energy, healthcare telemedicine and software innnovations. Having established a regional presence in 1906, Bosch employs over 22,500 associates in more than 100 locations, with sales of $9.8 billion in fiscal year 2011, per preliminary figures. For more information, visit .

The Bosch Group is a leading global supplier of technology and services. According to preliminary figures, more than 300,000 associates generated sales of 51.4 billion euros ($71.5 billion) in the areas of automotive and industrial technology, consumer goods, and building technology in fiscal year 2011. The Bosch Group comprises Robert Bosch GmbH and its more than 350 subsidiaries and regional companies in some 60 countries. If its sales and service partners are included, then Bosch is represented in roughly 150 countries. This worldwide development, manufacturing, and sales network is the foundation for further growth. Bosch spent more than 4 billion euros ($5.5 billion) for research and development in 2011, and applied for over 4,100 patents worldwide. With all its products and services, Bosch enhances the quality of life by providing solutions which are both innovative and beneficial. Further information is available online at and .


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Bosch Rexroth  Corporation
South Lakes Drive NC 28273-679
14001  Charlotte
Phone: (800) 739-7684