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xxx 2011-01-25

Tech Story: High-Precision Linear Rail Application for Semiconductor Manufacturing

Tech Story: High-Precision Linear Rail Application for Semiconductor Manufacturing

Metrology equipment suppliers and their customers could eliminate time and cost by considering high-accuracy linear guides, such as the Bosch Rexroth High-Precision Ball Rail® System, in their machine designs.

The most commonly used linear motion guide products for metrology applications have traditionally been systems without recirculating components, such as cross roller slides or air bearing systems. However, the lack of recirculating components in the cross roller slide leads to stroke limitations (typically 600mm or less) as well as reduced load capacity and rigidity. While air bearing systems do not have the stroke limitations of cross roller slides, they require expensive air supply systems and are more complex to install and set up.

Rexroth’s High-Precision Ball Rail System overcomes roughness at key transition points by optimizing the recirculation of the balls inside the runner block, providing extremely smooth motion and accuracies ranging between 4 and 6 microns. Because the Ball Rail System makes this performance so repeatable, it’s now possible to compensate for such minor deviations in the control of a precision machine, enabling achievement of near-perfect accuracy. Rexroth tests show a 60% reduction in pitch, roll and yaw compared to standard linear guide systems.

With the emergence of super-precise linear guides such as Rexroth’s High-Precision Ball Rail System, designers and machine builders in the metrology, scanning and optical equipment markets have new options for linear motion within their machines. These companies can now avoid the performance limitations of cross roller slides and the complexity and cost of air bearing systems, while retaining the accuracy and reliability required.

Download the complete technical story from the Bosch Rexroth Case Studies & Technical Papers web page.

Bosch Rexroth AG is one of the world’s leading specialists in the field of drive and control technologies. Under the brand name of Rexroth the company supplies more than 500,000 customers with tailored solutions for driving, controlling and moving. Bosch Rexroth is a partner for industrial applications and factory automation, mobile applications and renewable energy.

As The Drive & Control Company, Bosch Rexroth develops, produces and sells components and systems in more than 80 countries. In 2009 Bosch Rexroth, part of the Bosch Group, achieved sales of around $5.7 billion (4.1 billion Euro) with 34,200 employees.

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Bosch Rexroth  Corporation
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