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Bosch Rexroth to showcase drive and control systems for semiconductor production at SEMICON West 2014

Rexroth to exhibit automation, drive and control technology for wafer handling, printed electronics

Rexroth to exhibit automation, drive and control technology for wafer handling, printed electronics

Bosch Rexroth will share its automation technology portfolio and expertise for semiconductor manufacturing and printed electronics at SEMICON West 2014, held on July 8-10 at Moscone Center in San Francisco. The drive and control company will be exhibiting in booth 1717 in the South Hall.

Rexroth will exhibit several advanced drive and control systems, including the compact IndraDrive Cs control system with vibration isolation capabilities and roll-to-roll printing function blocks; the advanced NYCe 4000 motion control platform, the IndraMotion MLC controller featuring advanced Open Core Engineering capabilities as well as the IndraDyn L ironless MCL linear motor, which features high acceleration, ultra-precise endpoint control and no cogging.

In addition to a variety of product displays, the company will feature multi-techology demonstration units to showcase its drive and control technology for wafer handling and printed electronics:

  • LMS Linear Motion System with new LeviMotion capabilities: Bosch Rexroth will demonstrate a new advancement to its linear transport system that uses magnetic carriers driven by external coils to move wafers through process chambers. With the addition of magnetic levitation bearings, the entire system is now completely non-contact, enabling a particle-free transport solution well-suited for virtually all load factors, precision levels and motion profiles. Process applications include deposition, inspection and stepper systems.

  • Active Vibration Dampening: View an innovative demo that shows how Bosch Rexroth's vibration dampening technology addresses vibration reduction at the drive level, making it easier to implement on any master or controller. Drive-based processing makes ultra-precise motion and endpoint positioning easier and more efficient to accomplish, to improve throughput of semiconductor wafers within and between tools, among multiple applications.

  • IndraDrive Cs with printed electronics functionality: The mass production of printed electronic devices challenges manufacturers to solve issues such as web tension and registration control -- and this unique exhibit will demonstrate how Rexroth’s IndraDrive Cs with Roll2Roll function blocks offers multi-axis tension control solutions for high-quality, high-throughput digital roll-to-roll web processing.

  • IndraMotion MLC with Open Core Engineering: The latest version of Rexroth’s industry-leading IndraMotion MLC automation controller now supports the award-winning Open Core Engineering, which combines the previously separate PLC and IT worlds into one comprehensive solution portfolio. It permits enhanced access to the MLC control core, offers numerous higher-level programming languages and allows the integration of iOS and Android smart devices into automation systems.

Rexroth’s global application experience in the semiconductor industry equips the company to develop automation solutions for tools used in wafer production, front- and back-end of line production, circuit board assembly, and printed electronics.

Bosch Rexroth’s product portfolio includes a wide range of drives for rotary servo and stepper motors, as well as a variety of direct drives. Ironless linear motors specially developed for the semiconductor industry are available in five sizes with graded lengths to cover a broad scope of power and speed.

Rexroth also provides motion control systems with an open architecture and compact drives to meet users’ control needs. The company’s deep expertise in ultra-precise motion control enables equipment manufacturers to optimize their automation systems while delivering the uptime and yields the industry requires.

For linear motion needs, Rexroth features a comprehensive selection of linear motion modules, profiled rails, runner blocks and ball screw assemblies. Precise manufacturing with compatible accuracy and preload levels makes it possible for Rexroth to provide extensive combinations and modularity in all designs. Corrosion-resistant and cleanroom-compatible models can be used for standardization across all process steps.

In addition Rexroth has developed miniature and high-precision guides ideally suitable for the semiconductor industry. PSK precision modules handle highly dynamic motion of small masses in tight design space applications as ready-to-install linear systems. The integrated ball screw drive with a zero-clearance nut system guarantees exceptional positioning and repeat accuracy. Rexroth also excels in customized actuators for heater lift and pin lift applications of vacuum tools.

With several hundred process steps and alignment in the nanometer range, semiconductor production requires utmost precision, and Rexroth’s drive and control portfolio delivers on those requirements. The company‘s global engineering and application teams provide process-specific expertise to help customers develop scalable and integrated multi-technology systems. From jerk-free slow movement to high-speed positioning, Rexroth helps semiconductor process and inspection tool manufacturers master their drive and control challenges.

Bosch Rexroth product and automation technology experts will be available at SEMICON West 2014 in booth 1717 in South Hall.

About Bosch Rexroth:

Economical, precise, safe, and energy efficient: drive and control technology from Bosch Rexroth moves machines and systems of any size. The company bundles global application experience in the market segments of Mobile Applications, Machinery Applications and Engineering, Factory Automation, and Renewable Energies to develop innovative components as well as tailored system solutions and services. Bosch Rexroth offers its customers hydraulics, electric drives and controls, gear technology, and linear motion and assembly technology all from one source. With locations in over 80 countries, more than 36,700 associates generated sales revenue of approximately 5.7 billion euros ($7.6 billion) in 2013. To learn more, please visit

About Bosch:

In the U.S., Canada and Mexico, the Bosch Group manufactures and markets automotive original equipment and aftermarket solutions, industrial drives and control technology, power tools, security and communication systems, packaging technology, thermotechnology, household appliances, healthcare telemedicine and software solutions. Having established a regional presence in 1906, Bosch employs 24,600 associates in more than 100 locations, with consolidated sales of $10.4 billion in 2013. For more information, visit , and .

The Bosch Group is a leading global supplier of technology and services. In 2013, its roughly 281,000 associates generated sales of 46.1 billion euros ($61.2 billion). Its operations are divided into four business sectors: Automotive Technology, Industrial Technology, Consumer Goods, and Energy and Building Technology. The Bosch Group comprises Robert Bosch GmbH and its more than 360 subsidiaries and regional companies in some 50 countries. If its sales and service partners are included, then Bosch is represented in roughly 150 countries. This worldwide development, manufacturing, and sales network is the foundation for further growth. In 2013, Bosch invested some 4.5 billion euros ($6.0 billion) in research and development and applied for some 5,000 patents worldwide. The Bosch Group’s products and services are designed to fascinate, and to improve the quality of life by providing solutions which are both innovative and beneficial. In this way, the company offers technology worldwide that is “Invented for life.” Additional information on the global organization is available online at , , and .


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