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, 2016-07-06

Bosch Rexroth to exhibit drive and control systems for semiconductor production at SEMICON West 2016

Bosch Rexroth’s IMS-A

Rexroth will showcase several advanced drive and control systems, including the IMS-A integrated measuring system in booth 1817 at SEMICON West 2016.

Bosch Rexroth will share its automation technology portfolio and expertise for semiconductor manufacturing at SEMICON West 2016, July 12 -14, 2016 at Moscone Center in San Francisco. The drive and control company will be exhibiting at booth 1817 in the South Hall.

Bosch Rexroth is set to exhibit several advanced drive and control systems during SEMICON West 2016 in San Francisco July 12-14, 2016. Highlighting technologies in advanced motion control, collaborative system design, precision automation and inline process automation, the drive and control company will showcase the NYCe 4000 motion control platform, the IMS-I and IMS-A integrated measuring systems, open core engineering, linear systems, PSK precision modules and more. In addition, Rexroth’s booth will showcase demos for anti-slosh technology and active vibration technology using our, CKL, PSK and wafer lifts.

NYCe 4000 motion control system

The NYCe 4000 motion control system, used in the most advanced semiconductor applications, is now even more powerful! A new control enginer enables applications to run onboard the integrated Linux platform. The integrated real-time extensions guarantees optimal motion control performance while Linuz enables maximum application support and integration possibilities of different machine networks.

For onboard application development, the Eclipse based environment provides the support and enables short development cycles.

The new architecture on the NYCe 4000 enables you to make machines faster, better and more cost-effective, while shortening your time to market.

IMS-I and IMS-A integrated measuring systems

The IMS-I (incremental) and IMS-A (absolute) integrated measuring systems combine highly rigid Rexroth ball rail and roller rail systems with a non-contact length measuring system. Offering measurement accuracy comparable to that of high-precision glass scales, both systems offer simplified design with components completely integrated into the linear guide and no attachments required. Additionally, the IMS-A is best suited for applications requiring highly dynamic and accurate absolute positioning in high rigidity mechanical systems.

PSK precision modules

Rexroth’s PSK precision modules are ready-to-install linear motion systems that combine high performance with compact dimensions. Featuring a ball screw drive with the guide system integrated into a steel base, PSK precision modules increase accuracy and stiffness for small, multi-axis systems and high precision applications. PSK precision modules offer solutions for a range of speed and load capacity requirements with four sizes – 40mm to 90mm wide – available.

Open Core Engineering programming platform

Rexroth’s Open Core Engineering programming platform allows semiconductor tool builders and end-users to develop and program custom automation and machine control functionality using high-level languages that incorporate real-time access to platforms such as LabView and MatLab. Open Core Engineering makes this possible by opening the core of Rexroth’s PLC systems, enabling new integration opportunities to enhance automation production workflow and flexibility. Additionally, Open Core Engineering allows users to simplify the handling and diagnostics of machines by integrating tablet PCs and smartphones into the concepts.

Linear systems – standard modules or customized solutions

Bosch Rexroth offers a wide range of standard catalog modules with different drive options including ball screw, belt and linear motor. From simple actuation to precision and high-speed guided motion, Rexroth linear systems offer solutions to various challenges that arise in semiconductor processing from custom plating to clean room considerations. In addition, the custom systems group has the ability to design and integrate core Rexroth products into a motion system built for specific application needs.

With several hundred process steps and movements in the nanometer range, semiconductor production requires utmost precision, and Rexroth’s drive and control portfolio delivers on those requirements. The company‘s global engineering and application teams provide process-specific expertise to help customers develop scalable and integrated multi-technology systems. From jerk-free slow movement to high-speed positioning, Rexroth helps semiconductor process and inspection tool manufacturers master their drive and control challenges.

Bosch Rexroth product and automation technology experts will be available at SEMICON West 2016 in booth 1817 in the South Hall. For more information, visit .

About Bosch Rexroth

About Bosch Rexroth

Economical, precise, safe, and energy efficient: drive and control technology from Bosch Rexroth moves machines and systems of any size. The company bundles global application experience in the market segments of Mobile Applications, Machinery Applications and Engineering, and Factory Automation to develop innovative components as well as tailored system solutions and services. Bosch Rexroth offers its customers hydraulics, electric drives and controls, gear technology, and linear motion and assembly technology all from one source. With locations in over 80 countries, more than 31,100 associates generated sales revenue of approximately $5.99 billion (5.4 billion euros) in 2015. To learn more, please visit

About Bosch

Having established a regional presence in 1906 in North America, the Bosch Group employs some 28,700 associates in more than 100 locations, as of April 1, 2015. In 2014, Bosch generated consolidated sales of $11.3 billion in the U.S., Canada and Mexico. For more information, , and .

The Bosch Group is a leading global supplier of technology and services. It employs roughly 375,000 associates worldwide (as of December 31, 2015). The company generated sales of $78.3 billion (70.6 billion euros) in 2015. Its operations are divided into four business sectors: Mobility Solutions, Industrial Technology, Consumer Goods, and Energy and Building Technology. The Bosch Group comprises Robert Bosch GmbH and its roughly 440 subsidiaries and regional companies in some 60 countries. Including sales and service partners, Bosch’s global manufacturing and sales network covers some 150 countries. The basis for the company’s future growth is its innovative strength. Bosch employs 55,800 associates in research and development at 118 locations across the globe. The Bosch Group’s strategic objective is to deliver innovations for a connected life. Bosch improves quality of life worldwide with products and services that are innovative and spark enthusiasm. In short, Bosch creates technology that is “Invented for life.” Additional information is available online at and , .

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