SEMICON West 2016


Precise, flexible, efficient—automation solutions for the semiconductor industry

Stay competitive in today's rapidly changing semiconductor manufacturing market with high-precision automation technology for every segment of the microelectronics supply chain—from electronic design automation to device fabrication and final manufacturing. Our complete range of drive and control technologies can help you build the right solution to accelerate time to market and enhance your competitive edge.

Find our extensive technologies for semiconductor and electronics at SEMICON West, July 12-14, 2016, in San Francisco, South Hall Booth 1817.

We’ll show you our advanced Open Core Engineering platform, which combines traditional IT capabilities with PLC functionalities to give systems designers much more freedom to design automation solutions to meet unique process needs. You’ll also discover our NYCe 4000 motion control system, engineered to handle the most complex interpolated motion requirements, as well as our integrated measuring system and our high-precision ball rail systems.


Get drives, controls and linear motion technology for semiconductor applications delivered fast with our GoTo Focused Delivery Program.


  • Linear Systems

    Standard Modules or Customized Solutions

    Bosch Rexroth offers a wide range of standard catalog modules with many different drive options including ball screw, belt, and linear motor. From simple actuation to precision and high speed guided motion, we’ve got a solution for you.

    Additional options offered to accommodate many of the challenges present in semiconductor processing from custom plating to clean room considerations.

    Our custom systems group has the ability to design and integrate our core Rexroth products into a motion system built for your specific application needs.

  • Integrated Measuring

    High-performance guidance and measurement: Integrated Measuring Systems IMS-I and IMS-A

    The IMS-I (incremental) and IMS-A (absolute) integrated measuring systems combine highly rigid Rexroth ball rail and roller rail systems with a non-contact length measuring system. Both systems offer measurement accuracy comparable to that of high-precision glass scales, without the added complexity and cost of external mounting. The IMS-A is ideally suited for applications requiring highly dynamic and accurate absolute positioning in high rigidity mechanical systems.

    The IMS-I (Incremental) and the IMS-A (absolute) offer:

    • Wear-free and noise impervious operation, due to the non-contact inductive measuring principle
    • No need for an external battery back-up
    • Robust and insensitive to dirt and contamination (IP 67 protection type)
    • Simplified design with components completely integrated into the linear guide; no attachments required
    • Reduced machine assembly and alignment effort and time

  • NYCe 4000

    NYCe 4000 – the world best motion control system for Semicon

    The NYCe 4000 motion control system, used in the most advanced semiconductor applications, is now even more powerful! A new control engine enables your applications to run onboard the integrated Linux platform.

    The integrated real-time extension guarantees optimal motion control performance while Linux enables maximum application support and integration possibilities of differnt machine networks.

    For onboard application development, the Eclipse based environment provides the support and enables short development cycles.

    The new architecture on the NYCe 4000 enables you to make your machines faster, better and more cost-effective, while shortening your time to market.

    The NYCe 4000 systems offer:

    • Compact, integrated drive and control platform
    • High bandwidth control loops
    • Best motion control algorithms with sophisticated features
    • Powerful Linux based system with expandable memory size
    • Eclipse based development environment

  • Open Core

    Unprecedented freedom with Open Core Engineering

    For the first time, Open Core Engineering allows semiconductor tool builders and end-users to develop and program custom automation functionalities using high-level languages that incorporate real-time access to platforms such as LabView and MatLab. Rexroth’s Open Core Engineering makes this possible by opening the core of Rexroth’s PLC systems, enabling new integration opportunities to enhance automation production workflow and flexibility.

    With Open Core Engineering, you can also simplify the handling and diagnostics of your machines by integrating tablet PCs and smartphones into your concepts. It's easy to create smart device applications for your preferred target platform and thus facilitate wireless access to the control system with the various operating functions of those devices.

  • Inline Automation

    Lower costs, simplify fab logistics, improve yield

    In-line process automation is an alternate concept for the manufacturing of Semiconductors and Displays. It reduces machine and facility costs, simplifies the logistics in the fab and improves the production yield. With solutions using our NYCe4000 and XM series controls, systems can be connected vertically and horizontally via open interfaces and easily deliver relevant information in real-time.

    Our linear motion system (LMS) is linear motor based transport system that provides a contactless and particle-free solution for the positioning of materials and work pieces inside or between machines. It offers maximum accuracy and speed along with a high degree of flexibility and individual carriage control.

  • Industry 4.0

    Industry 4.0: Connected Automation Starts Now

    Industry 4.0

    As a pioneer of Industry 4.0, we are now seeing the visions of smart factories becoming a reality. Connected automation in manufacturing leads to a faster and more flexible production process, greater efficiency of material, and reduction of complexity and downtime.

    Open standards for connectivity are the key! This concept drives all of our offered solutions. With a huge automation portfolio and an abundance of production experience from plants worldwide, we can offer leading automation and manufacturing expertise.