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Precise, flexible, efficient—automation solutions for the semiconductor industry

Stay competitive in today's rapidly changing semiconductor manufacturing market with high-precision automation technology for every segment of the microelectronics supply chain—from electronic design automation to device fabrication and final manufacturing. With our latest advanced automation technologies and Industry 4.0 solutions, we can help you get from Lab to Fab faster than ever.

Find our extensive technologies for semiconductor and electronics at SEMICON West, in San Francisco, at the Moscone Center, South Hall, Booth 1117.


Active Cockpit and I4.0

Active Cockpit and I4.0

As an interactive communication platform ActiveCockpit processed and visualized production data in real time. ActiveCockpit networked IT applications such as production planning, quality data management and e-mailing with the software functionality of machines and plants. The information is the basis for decisions and process improvements.

Advantages resulting from special product features

  • All relevant information available to everyone in real time directly on the production line
  • Intelligent networking saves information processing time
  • More efficient improvement processes through clear analysis and conclusive task definition with ActiveCockpit

Industry 4.0

Real-time collection, processing and visualization of all relevant data of a manufacturing facility for the exchange of information between people, machines and production process on the shop floor

Interactive software for the diagnosis and optimization of machines and processes, and disorder management

Browser-based Internet standards and openness to third-party applications

Easy connection to back-end systems (MES / ERP)


  • Systems

    Standard Modules or Customized Solutions


    Bosch Rexroth offers a wide range of standard catalog systems with many different drive options including ball screw and belt as well as directly driven options such as linear and kit motors. From simple actuation to the most demanding motion challenges, we have a solution for you.

    Additional options offered to accommodate many of the challenges present in semiconductor processing from custom plating to clean room considerations.

    Our custom systems group has the ability to design and integrate our core Rexroth products into a motion system built for your specific application needs.

  • Integrated Measuring  

    High-performance guidance and measurement: Integrated Measuring Systems IMS-I and IMS-A

    The IMS-I (incremental) and IMS-A (absolute) integrated measuring systems combine highly rigid Rexroth ball rail and roller rail systems with a non-contact length measuring system. Both systems offer measurement accuracy comparable to that of high-precision glass scales, without the added complexity and cost of external mounting. The IMS-A is ideally suited for applications requiring highly dynamic and accurate absolute positioning in high rigidity mechanical systems.

    The IMS-I (Incremental) and the IMS-A (absolute) offer:

    • Wear-free and noise impervious operation, due to the non-contact inductive measuring principle
    • No need for an external battery back-up
    • Robust and insensitive to dirt and contamination (IP 67 protection type)
    • Simplified design with components completely integrated into the linear guide; no attachments required
    • Reduced machine assembly and alignment effort and time

  • Inline Automation  

    Lower costs, simplify fab logistics, improve yield

    Inline Automation

    In-line process automation is an alternate concept for the manufacturing of Semiconductors and Displays. It reduces machine and facility costs, simplifies the logistics in the fab and improves the production yield. With solutions using our YM and XM series advanced controls, systems can be connected vertically and horizontally via open standards and easily deliver relevant information in real-time.

    Our Flexible Transport System (FTS) is a linear motor based transport system that provides a contactless and particle-free solution for the positioning of materials and work pieces inside or between machines. The system works both in and out of vacuum and cables do not tether the carriage. It offers maximum accuracy and speed along with a high degree of flexibility and individual carriage control.

  • Advanced Control  

    YM Controller - the world best motion control system for Semiconductor

    The YM motion control system, engineered specifically for the most advanced semiconductor applications, is now even more powerful! A new control engine enables your applications to run onboard the integrated Linux platform.

    The integrated real-time extension guarantees optimal motion control performance, while Linux enables maximum application support and integration possibilities of different machine networks.

    For onboard application development, the Eclipse based environment provides the support and enables short development cycles. The new architecture on the YM will make your machines faster, better and more cost-effective, while shortening your time to market.

    The YM systems offer:

    • Compact, modular, integrated drive and control platform
    • 32 kHz bandwidth control loops
    • Best motion control algorithms with sophisticated features
    • Powerful Linux based system with expandable memory size
    • Eclipse based development environment

  • IoT Gateway  

    Fast and flexible connection of machines to Industry 4.0

    Fast and flexible connection of machines to Industry 4.0

    Network new and existing machines cost efficiently and optimize production processes and product quality: The IoT Gateway makes it easy to connect to Industry 4.0 environments without intervening in the automation logic. The precisely coordinated combination of control hardware and software for implementing IT applications collects sensor and process data, transmits it to MES, cloud applications or local machine state monitoring systems, for example, and enables process data analysis.