JST goes to great lengths to advance semiconductor manufacturing with Rexroth automation

JST

Challenge:

Create a 138-foot-long wet bench silicon cleaning station utilizing multiple Cartesian robots driven by a combination of linear motion and control technologies.

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Rexroth Solution:

  • Also used Bell-Everman ServoBelt™ linear motion modules running on Rexroth profiled linear guide rail and extruded aluminum framing system

Results:

  • Effective use of overhead Cartesian robots
  • Precision, accuracy and repeatability across the 138-foot length of the cleaning station
  • Robustness and reliability
  • Cleanliness to Class 10 cleanroom standards
  • System ordered as single part number