Evaluating linear motion solutions for vacuum deposition chambers in industrial-scale PV manufacturing

Linear motion for PV

Challenge:

Create a linear motion solution for vacuum deposition chambers that can maintain hard vacuums for long process runs, run transport system elements from outside to inside chambers, withstand high temperatures and caustic vapors, and control movement precisely

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Results:

  • "Inverse" linear system places magnet on the carrier
  • Multiple intelligently-controlled electronic coils drive carrier
  • Increased uptime due to minimized service, longer component life
  • Greater yield potential -- no moving parts to cause contamination
  • Vacuum chamber integrity improves process quality