PI 041-14 Lohr am Main, 2014-05-23

Flexible and particle-free for OLED production

The Linear Motion System from Rexroth satisfies the demands made on OLED production in high vacuum through magnetic operating principle to the drive of the carriers.

Contactless handling with Linear Motion System from Rexroth meets the most stringent contamination requirements for displays

Positioning displays particle-free in a high vacuum or moving an optional number of substrate carriers independently of one another or synchronously: The Linear Motion System from Rexroth increases process reliability and flexibility in the production of displays and also meets the significantly tightened requirements for the production of large displays of the tenth generation. Through the contactless drive principle and a matched control the system simplifies the design of process plant and allows a swift changeover to new products.

OLED productions of the eighth generation or higher place exacting process demands on cleanliness: As few as six particles having a size of 50 nm cause rejects. Mechanical handling solutions fulfil these conditions, if at all, only with a very high design effort. The components must be completely encapsulated and all of the cable inlets and through-drives for the motor shafts must be sealed. In contrast to this, the Linear Motion System (LMS) from Rexroth drives an optional number of substrate carriers according to the principle of an inverted linear motor purely magnetically and hence contactless. All of the electrical components are located outside the process chambers and need no physical connection to the carriers. There are therefore no sources of unwanted particle emission and the system increases the process reliability. This is confirmed by practical experience in the display production of LED and OLED.

The LMS is not only extremely clean, but also highly flexible. The motion control NYCe 4000 positions the carriers either individually and independently of one another or also in a coordinated way. Plant manufacturers can use an optional number of substrate carriers in various performance levels without having to make any changes to the process chamber. The open software structure of the control NYCe4000, which is matched to the LMS, simplifies the integration into existing system concepts. It realizes the variance of the system configuration in the software. This reduces the engineering effort and shortens the time to market of production equipment. At the same time, the LMS increases the flexibility of display manufacturers to gear their production to ever shorter lifecycles of, for example, mobile phones and TV sets. For converting systems already installed to new production sequences, it is sufficient to simply adapt the software.

The LMS allows optional handling routes and distances and an optional number of carriers under nearly all process conditions. The carriers cover weights ranging from 1 kg to more than 1,000 kg. The repeatability of positioning reaches up to 10 µm.

Economical, precise, safe, and energy efficient: drive and control technology from Bosch Rexroth moves machines and systems of any size. The company bundles global application experience in the market segments of Mobile Applications, Machinery Applications and Engineering, Factory Automation, and Renewable Energies to develop innovative components as well as tailored system solutions and services. Bosch Rexroth offers its customers hydraulics, electric drives and controls, gear technology, and linear motion and assembly technology all from one source. With locations in over 80 countries, roughly 36,700 associates generated sales revenue of approximately 5.7 billion euros in 2013.

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The Bosch Group is a leading global supplier of technology and services. In 2013, its roughly 281,000 associates generated sales of 46.1 billion euros. (NB: Due to a change in accounting policies, the 2013 figures can only be compared to a limited extent with the 2012 figures). Its operations are divided into four business sectors: Automotive Technology, Industrial Technology, Consumer Goods, and Energy and Building Technology. The Bosch Group comprises Robert Bosch GmbH and its roughly 360 subsidiaries and regional companies in some 50 countries. If its sales and service partners are included, then Bosch is represented in roughly 150 countries. This worldwide development, manufacturing, and sales network is the foundation for further growth. In 2013, the Bosch Group invested some 4.5 billion euros in research and development and applied for some 5,000 patents. This is an average of 20 patents per day. The Bosch Group’s products and services are designed to fascinate, and to improve the quality of life by providing solutions which are both innovative and beneficial. In this way, the company offers technology worldwide that is “Invented for life.”

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Susanne Herzlieb
Maria-Theresien-Straße 23
97816 Lohr am Main
Phone: +49 9352 18-1573

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