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Bosch Rexroth semiconductor and electronics technology

The semiconductor industry has a very special set of automation needs including mechatronic modules designed for smooth motion during wafer handling, non-contact material through the process chambers and nano-meterscale positioning accuracies. Bosch Rexroth has more than ten years of in-depth application experience in the industry. This concentrated expertise is channeled into the ongoing development of new components, modules and product lines for the entire front end and back end.


Five programs – one major advantage: tailored solutions boost efficiency

We offer five scalable automation programs designed for typical semiconductor production applications, which give you the opportunity to reduce your time to market. Each program is built around a set of harmonized components covering the full range of technologies. Tailored mechatronic solutions translate into reduced need for vertical integration. Based on your requirements, our team of specialists designs complete subsystems specifically optimized for the semiconductor industry. All you need to do is install them and set the parameters.


Technology for high precision, high speed

High precision positioning with tight IO synchronisation

Flexible and accurate linear transport


Products for high speed and high precision Gantry applications

Modular motion solutions, open to third party actuators