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Linear Motion System


Flexible and accurate linear transport under challenging process conditions.

An external non-contact motion system moves the wafers through the process chambers: The Rexroth LMS Linear Motion System features a greatly simplified design which offers extremely high flexibility.

Coils mounted outside the chamber provide drive power for magnetic carriers having no need for seals. Availability increases because all of the components are mounted outside the chamber. The technology is suited for virtually all load factors, precision levels and motion profiles. The system offers great flexibility allowing individual carriers to move forwards and backwards at different speeds.


Innovative and intelligent

Simple and backlash-free

High dynamics and precision