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Linear Motion System

Linear Motion System

Like on a magnetic levitation track, product glides contact-free through a vacuum chamber on the LMS intelligent transport system.

Whether in a vacuum, cleanroom or at high temperature: The method makes possible work under cleanroom conditions with precise control and high process speed.

Benefit from the intelligent drive concept for contact-free transport at demanding process conditions.

Your Benefit

  • All electrical components, wiring and sensors are outside the process chamber
  • Practically wear- and maintenance-free.
  • Motion Control NYCe 4000 ensures positioning with speeds greater than 2m/s and up to 5μm resolution

...find out more about the linear motion system in our product catalog