Focus products:
Accelerate semiconductor engineering and automation
Welcome to your experienced engineering and automation partner for mechatronics and motion control. We support you with high-speed engineering and ready-to-use solutions throughout the entire semiconductor and electronics value stream.
A 20+years track record combined with fast responsiveness
Gain speed from the lab to the fab – with close collaboration from the first prototype. Unlock simplicity with ready-to-use mechatronic subassemblies and precision motion control designed for your application. All of them fit easily and seamlessly into your machine design. Master scalability with copy-exact manufacturing. Leverage sustainability and longevity with our in-house quality components. And for any support, our expert engineering teams are always close to you.
Front-End
Wafer Transport OHT
YOUR VALUE STREAM NEEDS ...
- Frame structure
- Load capacity
- Interface to OHT
- Safety & cleanroom considerations
Product Category:
COMPONENTS
Cleanroom aluminum strut profiles and connecting elements
BENEFITS
- Anodized aluminum to reduce particle generation
- Cover open T-slots with slot covers for cleanroom compliance
- Compatibility with ISO Class 3–4 environments
-
Mounting brackets and fasteners
(M8 stainless or stronger) resist vibration
Wafer Cleaning – Wafer Handling System for Wafer Batch Cleaning
YOUR VALUE STREAM NEEDS ...
- Splash-free wafer movement
- Minimized particle contamination
Product Category:
SUB-ASSEMBLY
Batch Wafer Handling:
Seamless, precise transport of wafer boats through every stage of the wet cleaning process
BENEFITS
-
Precision Engineering
Multi-axis motion control and jerk-limited lift-outs enable highly accurate wafer handling. Ensures repeatable, smooth movement for minimal mechanical stress. -
High Throughput & Efficiency
Optimized for continuous, fast wafer transfers without compromising safety or precision. Boosts productivity while maintaining consistent process quality. -
Gentle & Splash-Free Handling
Designed to minimize mechanical and chemical stress on wafers. Ensures integrity of sensitive wafer surfaces during wet processing.
Wafer Cleaning – Wafer Handling System for Single Wafer Cleaning
YOUR VALUE STREAM NEEDS ...
- Compatibility with all major CMP and metrology platforms
- SEMI E84/E87 compliance
Product Category:
SUB-ASSEMBLY
Single Wafer Handling:
High-precision wafer transport solution for the single wafer cleaning between CMP & downstream process
BENEFITS
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High-Precision Transport
Ensures accurate and stable wafer movement between CMP and downstream processes. Minimizes wafer misalignment and handling errors. -
Seamless CMP Integration
Designed specifically for transfer between CMP equipment and subsequent cleaning or processing stations. -
High Throughput & Efficiency
Optimized for rapid wafer transport without compromising precision. Enhances overall process yield and production efficiency.
Deposition
YOUR VALUE STREAM NEEDS ...
-
Cleanliness and contamination control:
ISO 5 clean room at minimum. No lubricants that outgas or create particles – often dry bearings or vacuum-compatible greases -
Temperature and material compatibility:
Tolerance of process temperatures (up to ~450 °C for CVD, higher for some PVD) without deformation
Product Category:
SUB-ASSEMBLY
Wafer Pin Lift:
Our wafer handling system for deposition guarantees accurate lift and position functions
BENEFITS
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Precise Wafer Elevation & Support
Ensures accurate lifting and lowering of wafers during deposition, preventing surface contact that could damage delicate films. -
Vacuum & Clean Room Compatibility
Constructed from ultra-clean, low-outgassing materials to meet stringent vacuum and cleanroom requirements -
Stable, Repeatable Positioning
Provides micrometer-level repeatability to maintain uniform film thickness and precise process alignment
Etching – Wafer Handling System for Loading in Etch
YOUR VALUE STREAM NEEDS ...
- Reliable, contamination-free wafer transfer into critical etching environments
- Precise alignment, secure positioning, and smooth hand-off between cassettes, FOUPs, and etch chambers
Product Category:
SUB-ASSEMBLY
Delivery of ultra-reliable, contamination-free wafer transfer into critical etching environments
BENEFITS
-
Precision Alignment & Positioning
Ensures accurate wafer centering and orientation for reliable transfer into etch chambers. -
Seamless Automation Integration
Fully compatible with robotic arms, FOUP loaders, and factory automation (FA) systems for high-throughput operation. -
High Cycle Durability
Built for continuous 24/7 operation with proven mechanical longevity and minimal maintenance requirements.
Etching – Wafer Handling System for Wet Etch
YOUR VALUE STREAM NEEDS ...
- Suitability for pre- and post-etch cleaning
- High-quality particle and residue removal
- Minimized chemical consumption and wafer stress
Product Category:
SUB-ASSEMBLY
State-of-the-art single-wafer cleaning system for precision wet processing in semicon manufacturing
BENEFITS
-
Micron-Level Positional Accuracy
Precise lift height control ensures proper alignment with spray, immersion, or dispense nozzles. -
Ultra-Low Particle Generation
Clean, contact-optimized mechanics to minimize contamination during corrosive wet processing. -
Automation Ready
Integrates seamlessly with wet bench handling systems and robotic transfer modules.
CMP
YOUR VALUE STREAM NEEDS ...
-
Gentle handling:
Smooth acceleration profiles to prevent wafer slip or breakage -
Clean environment:
Antistatic design to reduce particle attraction -
Precise positioning:
Align wafers exactly at the input port of the next tool -
Integration:
Communication with both tools’ load ports and factory automation
Product Category:
SUB-ASSEMBLY
Spin Unit Polishing:
System for ultra-precise wafer handling during Chemical Mechanical Planarization
BENEFITS
-
Stable Rotational Control
Engineered for smooth, vibration-free spin motion to achieve defect-free planar surfaces. -
Chemical & Slurry Resistant
Materials constructed with corrosion-resistant components to withstand abrasive slurries and aggressive CMP chemistries. -
Seamless Tool Integration
Fully compatible with automated wafer handling and CMP process automation platforms.
Wafer Inspection & Test
YOUR VALUE STREAM NEEDS ...
- Precision and accuracy
- Throughput and cycle time
- Cleanliness and contamination control
Product Category:
SOLUTION SET
Wafer inspection & testing with ctrlX MOTION and linear systems
BENEFITS
-
Straightness and flatness of linear rails:
≤ 1 µm/100 mm -
Positioning repeatability:
≤ ±0.5 µm (X/Y), ≤ ±1 µrad (rotation) - Multi-axis coordinated motion with jerk-limited profiles for smooth, fast moves
- Closed-loop motion control with trajectory planning for X/Y/Z/θ axes
- Integration with SECS/GEM
Back-End
Wafer Back-Grinding
YOUR VALUE STREAM NEEDS ...
- Sub-micron linear positioning
- Cleanroom compliance
- High stiffness, vibration damping
- Spindle synchronization
Product Category:
SOLUTION SET
ctrlX MOTION with linear axes and integrated diagnostics
BENEFITS
- Drives with low backlash – high surface quality
- High repeatability – fewer rejects
- Scalable control system – fits any size
- Integrated diagnostics – reduced maintenance
- Predefined motion profiles – fast commissioning
Wafer Dicing
YOUR VALUE STREAM NEEDS ...
- High-speed, backlash-free XY movement
- Vision-based path correction
- Sub-micron repeatability
- Cleanroom class 5-6
Product Category:
SOLUTION SET
Motion solution with XYZ control using ctrlX CORE
BENEFITS
- High-speed positioning – faster cuts
- Stable motion – precise blade movement
- Compact modules – cleanroom-ready
- Open automation interfaces – easy PLC/HMI link
- Diagnostics tool – fast troubleshooting
- Energy-efficient drives – lower costs
Chip Testing
YOUR VALUE STREAM NEEDS ...
-
Stage movement:
Repeatability; synchronization with optics/sensors, thermal compensation -
Chuck movement:
Smooth acceleration / deceleration, positioning accuracy (XYZ) -
Active damped wafer stage:
Precise movement, repeatability, accurate positioning
Product Category:
SOLUTION SET
Stage and chuck movement solutions with ctrlX MOTION, drives & controls and linear systems
BENEFITS
- Precise wafer alignment with inspection optics
- Prevents wafer slippage or vibration
- Consistent movement over time – process stability across temperature range
- Sub-nanometer precision for defect detection
- Accurate triggering of cameras or sensors during motion
Die-Bonding
YOUR VALUE STREAM NEEDS ...
- Repeatability
- High positioning accuracy
- Thermal compensation & drift correction
- Synchronization with inspection optics / sensors
Product Category:
SOLUTION SET
Basic bonding motion solution (ctrlX Motion) + force loop integration
BENEFITS
- Components with precise Z-force control for high bonding quality
- EtherCAT integration for seamless communication
- Solution set with customizable HMI & control logic – less errors, safe usage
- Realtime feedback – reduced scrap
- Flexible system integration
Chip Molding
YOUR VALUE STREAM NEEDS ...
- Mold press force/position monitoring
- Rigid, thermally stable axes
- Process sealing & cleanliness
- Parallel axis actuation
Product Category:
SOLUTION SET
High-force motion kit with closed-loop control (ctrlX MOTION)
BENEFITS
- Components for precise mold closure – with no hydraulics
- Easy maintenance – low downtime
- Closed-loop pressure and position – high stability
- Custom motion profiles – product-specific control
- Reduced wiring – cleaner cabinet
Final Test
YOUR VALUE STREAM NEEDS ...
- High-speed indexing
- Integration with testers
- Repeatable placement
- Clean motion and safety
- Data capture
Product Category:
SOLUTION SET
ctrlX S-MOTION with modular HMI and vision interface
BENEFITS
- Components enabling high dynamics and precision motion – for fast test cycles and accurate results
- MES-ready connectivity – digital factory fit
- Scalable motion hardware and software – easy updates
- Flexible integration with existing test lines – reduced CAPEX
Electronics Production
Surface Mount Technology (SMT)
Soldering
Focus products:
Inspection
Focus products:
Chip Transport
Manufactured for scalability
Trust, speed, and a common language – these are the advantages of working with our global team of experts. Located at the heart of the semiconductor industry’s hotspots, we bring together a wide range of expertise. Beyond leading engineering, you can rely on an extremely high level of vertical integration, which makes our products independent of supply chain issues. With our global manufacturing network, we are where you are.
