Bosch Rexroth wafer handling and wafer processing solutions are designed to perfectly balance high-dynamic servo drives, high-rigidity linear subsystems and pneumatic actuators – with high rigidity and no overshoot or backlash. This enables less idle time and standardized handling throughout your front-end operations. In addition, vibration is prevented by pre-defined algorithms in the motion control systems. And smoother motion sequences enable higher-order motion profiles and spline functions.
Our wafer stages program has been designed for high precision motion control within the nanometer range. It is therefore ideal for wafer alignment, positioning and testing in the quality control phase. The precision motion control system MPC guarantees high precision with a 1 - 5 nm resolution as well as slow uniform motion ≥ 50 nm/s. Special servo motors and ironless linear and torque motors enhance dynamic performance. High-precision linear guides eliminate vibration. The addition of a pneumatic subsystem completes the automation package. Higher-order motion profiles and spline functions produce smoother motion sequences.
Flexible transport system
Simplified and able to perform under the most challenging conditions, the Rexroth flexible transport system FTS integrates an external non-contact motion system. Coils mounted outside the chamber provide drive power for magnetic carriers that don’t require seals. The external mounting also increases availability. This linear motion technology is suited for virtually all load factors, precision levels and motion profiles. The system allows exceptional flexibility and enables individual carriers to move forwards and backwards at varying speeds.
For flat-panel displays and solar modules, Bosch Rexroth gantry systems provide torsion-free positioning with high accuracy. Included in this range of gantry automation systems are components of a broad range of sizes and load ratings. The motion control system provides high-dynamic, high-precision coordination of two axes, each with its own control loop, without any mechanical connection. Also, maximum contour precision is ensured through Sercos-based real-time synchronization.
Servo motor drives for improved accuracy, speed and machine outputs with seamless format changes. High-dynamic servo drives and compact linear motion technology minimize feed times during format changes. Seamless electronic transmissions and register control enable format changes without delay.
Multizone web tension control
Enabling a more stable production process by facilitating multiple web tension control zones. Modern roll-to-roll machines require different web tension control zones to ensure a stable, reliable production process. Rexroth Multizone web tension control uses a "decoupling" technique to facilitate multiple tension zones in a machine.
From brief stopping of a web section, as occurs during inspection work to continuous web transport in the plant and enhanced productivity thanks to reduced cycle times.
The process of lamination – joining multiple film-like layers with a base material – requires a high web speed and exact web tensioning across a large area. Open system architecture allows easy integration of third-party components. Compact control cabinets reduces the machine’s installation surface.
High-performance, controller-based control systems from Bosch Rexroth make the laser machining process possible during continuous web transport. Continuous web transport in the machine, higher productivity of machine via faster cycle times and lower costs with no control cabinet required, since an additional control system is not needed.
Ensuring particulate-free substrate transport is absolutely essential for the coating process, especially when it involves OLED lighting applications. To this end, Rexroth offers the flexible transport system FTS for linear travel motions, which can be used under high vacuum conditions. It does not give off or discharge any foreign particles, thereby improving the quality of coating processes. Coils mounted outside the chamber provide drive power for magnetic carriers. There is no need for seals, and availability increases because all of the electrical components are mounted outside the chamber.