Wafer handling


Technology for high precision, high speed and smooth wafer handling.

High rigidity, no overshoot, no backlash: Bosch Rexroth wafer handling solutions are designed for perfect balance between high-dynamic servo drives, high-rigidity linear subsystems and pneumatic actuators. What this means to you is less unproductive idle time combined with standardized handling throughout your front-end operations. Pre-defined algorithms on the motion control systems prevent vibration. Higher-order motion profiles and spline functions produce smoother motion sequences.


Long-life and smooth running

Compact and powerful