Wafer stages


High precision positioning and highly coordinated moves with tight IO synchronisation

The wafer stages program supports high-precision motion control in the nanometer range for wafer alignment, positioning and testing, as used in inspection and quality control.

The NYCe 4000 motion control system guarantees high precision at 1 - 5 nm resolution as well as slow uniform motion ≥ 50 nm/s. Special servo motors and ironless lin-ear and torque motors enhance dynamic performance. High-precision linear guides eliminate vibration. By adding a pneumatic subsystem, we can put together a complete automation package.


Powerful and open

Quiet and high dynamics

Fast and smooth