Wafer stages


High precision positioning and highly coordinated moves with tight IO synchronisation

The wafer stages program supports high-precision motion control in the nanometer range for wafer alignment, positioning and testing, as used in inspection and quality control.

The NYCe 4000 motion control system guarantees high precision at 1 - 5 nm resolution as well as slow uniform motion ≥ 50 nm/s. Special servo motors and ironless lin-ear and torque motors enhance dynamic performance. High-precision linear guides eliminate vibration. By adding a pneumatic subsystem, we can put together a complete automation package.


NYCe 4000 for wafer stage positioning

Powerful and open

Cam roller guides for wafer stage handling

Quiet and high dynamics

Ironless linear motors for wafer stage handling

Fast and smooth