Wafer cleaning

Content
 
 

Requirement

  • Careful transport
  • Modular structure: Depending on requirements several portals can be independently realized
  • Low-cost
  • Media-resistant
 
 

Solution

  • X-axis: Corrosion-resistant ball/rail track guidance with rack and pinion drive (variable length for maximum dynamics)
  • Vertical portal axis: Ball/rail track guidance and drive unit AOK
  • Drive: Indradrive CS (Cs) servo motors
  • Control: Indramotion for handling
  • Pneumatic stainless steel cylinder and Cleanline valves
 
 

Your Benefit

  • High machine availability due to special surface corrosion protection on the individual components
  • Machine assembly work minimized due to fully coordinated components to the motor